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在LCD、LED等显示器件行业经常使用电导率很高的超纯水对某些材料进行清洗。以往采用测定电导率水平的方式来评估水质,无法确定到某种有害的金属与非金属元素对LCD、LED等显示器件显色质量的影响。采用ICP-MS对电子级高纯水中二十余种元素进行分析,该方法检出限可以达到5.0×10-9,相对标准偏差(RSD)为2.955%~3.576%,分析结果准确可靠。方法的灵敏度高、稳定性好,较好地满足电子工业对电子级高纯水的测定要求,可以严格确定某些元素的指标限,从而更好地保障显示器的显示质量。
In the LCD, LED and other display devices industry often use ultra-pure water conductivity of certain materials for cleaning. In the past, the method of measuring the conductivity level was used to evaluate the water quality, and the influence of some harmful metal and non-metal elements on the color development of LCD, LED and other display devices can not be determined. The analytical results of more than 20 elements in electronic grade high purity water by ICP-MS showed that the detection limit was 5.0 × 10-9 and the relative standard deviation (RSD) was 2.955% ~ 3.576%. The analytical results were accurate and reliable. The method has high sensitivity and good stability, and meets the requirements of the electronic industry for the determination of electronic grade high-purity water. The limit of some elements can be strictly determined so as to better ensure the display quality of the display.