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本文介绍了一种LPCVD管的NF3现场清洗方法。与传统的方法相比，现场清洗可提高设备的利用率和产量，同时降低化学材料的损耗。通过附力。泵系统对残余物进行分流消除了对LPCVD系统本身的泵站的损害，安装NF3清洗系统的资金回收时间约需3至6个月。
This article describes a NFPC on-site cleaning method for LPCVD tubes. In comparison with traditional methods, on-site cleaning can increase equipment utilization and yield, while reducing chemical material losses. Through the attachment. Pump System Shunt Residuals Eliminate pump damage to the LPCVD system itself. Recycling of the NF3 cleaning system takes about three to six months to recover.