It is noted that the behavior of most piezoelectric materials is temperature dependent and suchpiezo-thermo-elastic coupling phenomenon has become even more pronounced in the case of finite deforma-tion.On the other hand,for the purpose of precise shape and vibration control of piezoelectric smart struc-tures,their deformation under external excitation must be ideally modeled.This demands a thorough study ofthe coupled piezo-thermo-elastic response under finite deformation.In this study,the governing equations ofpiezoelectric stractures are formulated through the theory of virtual displacement principle and a finite elementmethod is developed,it should be emphasized that in the finite element method the fully coupled piezo-ther-mo-elastic behavior and the geometric non-linearity ate considered.The method developed is then applied tosimulate the dynamic and steady response of a clamped plate to heat flux acting on one side of the plate tomimic the behavior of a battery plate of satellite irradiated under the sun.The results obtained are comparedagainst classical solutions,whereby the thermal conductivity is assumed to be independent of deformation.Itis found that the full-cnupled theory predicts less transient response of the temperature compared to the clas-sic analysis.In the steady state limit,the predicted temperature distribution within the plate for small heatflux is almost the same for both analyses.However,it is noted that increasing the heat flux will increase thedeviation between the predictions of the temperature distributinn by the full coupled theory and by the classicanalysis.It is concluded from the present study that,in order to precisely predict the deformation of smartstructures,the piezo-thermo-elastic coupling,geometric nou-linearity and the deformation dependent thermalconductivity should be taken into account. It is noted that the behavior of most piezoelectric materials is temperature dependent and such piezo-thermo-elastic coupling phenomenon has become even more pronounced in the case of finite deforma tion. On the other hand, for the purpose of precise shape and vibration control of piezoelectric, piezoelectric, piezoelectric, piezoresistive, piezoelectric, piezoelectric, piezoresistive, piezoelectric, piezoresistive principle and a finite elementmethod is developed, it should be emphasized that in the finite element method the fully coupled piezo-ther-mo-elastic behavior and the geometric non-linearity ate considered. method developed then then tosimulate the dynamic and steady response of a clamped plate to heat flux acting on one side of the plate tomimic the behavior of a battery plate of satellit eradiated under the sun.The results obtained are comparedagainst classical solutions, whereby the thermal conductivity is assumed to be independent of deformation. It has found that the full-cnupled theory predicts less transient response of the temperature compared to the clas-sic analysis. the steady state distribution, the predicted temperature distribution within the plate for small heatflux is almost the same for both analyses.However, it is noted that increasing the heat flux will increase the relationship between the predictions of the temperature distributinn by the full coupled theory and by the classicanalysis. It is concluded from the present study that, in order to precisely predict the deformation of smartstructures, the piezo-thermo-elastic coupling, geometric nou-linearity and the deformation dependent thermal conductivity should be taken into account.