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可调光衰减器(VOA)是波分复用(WDM)系统中最重要的器件之一,它的主要功能是控制和衰减光信号。设计并制备了基于石英衬底的4通道马赫增德尔(Mach-Zehnder)干涉型热光可调光衰减器阵列。首先介绍了热光可调光衰减器的结构和原理,模拟了在有外加偏压时的热场分布,然后介绍了器件的设计及制备工艺过程,并对所制备的器件进行测试。实验结果表明,制备器件的插入损耗小于1.1 dB,动态衰减范围为0~30 dB。在衰减量为30 dB时,外加偏压为12.5 V,功耗仅有120 mW。最后分析了测试结果,并提出了改善器件性能的方法。
The dimmable attenuator (VOA) is one of the most important components in wavelength division multiplexing (WDM) systems and its primary function is to control and attenuate optical signals. A 4-channel Mach-Zehnder interference thermo-optic dimmable attenuator array based on quartz substrate was designed and fabricated. Firstly, the structure and principle of the thermo-optic dimmable attenuator are introduced. The thermal field distribution is simulated when the bias voltage is applied. Then the design and fabrication process of the device are introduced. The prepared device is tested. The experimental results show that the insertion loss of fabricated devices is less than 1.1 dB and the dynamic attenuation range is 0 ~ 30 dB. With a 30 dB attenuation, the bias voltage is 12.5 V and consumes only 120 mW. Finally, the test results are analyzed and the methods to improve the performance of the device are proposed.