论文部分内容阅读
本文提出两种结构的具有环形阳极的马鞍场电子振荡微电离规(以下简称鞍场规),它其于可以产生电子路径,因而产生有效的气相电离的静电马鞍场约束的基础上。此种新颖、独特结构的鞍场规具有高灵敏度(500托~(-1))、量测范围宽(10~(-4)-10~(-10)托)、尺寸小(以柱型规管为例,外径约11～12mm,管长小于50mm)、功耗低(<0.15毫瓦),不需要任何去气电源,放气率极低,吸气率约为标准BA规的几十分之一。鞍场规与标准BA规和分离规的比较量测表明,在压强逐渐降低时,鞍场规不存在BA规由于电子诱导栅极正离子脱附产生的灵敏度异常现象,因此鞍场规特别适合于航天空间及密封器件内高真空和超高真空量测。
This paper presents two structures of saddle field electron oscillating micro-ionization gauge (hereinafter referred to as saddle gauge) with a ring anode, which is based on the restriction of the electrostatic saddle field which can produce the electron path and thus produce effective gas phase ionization. The novel and unique structure of the saddle field gauge has the advantages of high sensitivity (500 torr -1), wide measurement range (10 -4 -10 -10 torr), small size Regulation, for example, the outer diameter of about 11 ~ 12mm, tube length less than 50mm), low power consumption (<0.15 milliwatts), does not require any degassing power, low outgassing rate, A few tenths. Comparison of saddle gauge with standard BA gauge and separation gauge shows that saddle gauge is particularly suitable for saddle gauge gauge because there is no sensitivity abnormality due to electron induced gate positive ion desorption Measurement of high vacuum and ultrahigh vacuum in space and sealing devices.