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本文通过研究高分辨电子显微像的图像处理技术,系统地建立了两种高分辨原子像亮点中心精确定位的处理方法:灰度梯度检测法和峰谷提取-灰度平均法。基于原子像亮点中心定位技术,使用最小二乘法,建立了测量高分辨像中局部点阵参数和晶格畸变的实际处理过程。结合像模拟、图像匹配等手段,详细研究了从高分辨像中提取元素分布、原子结构等信息的定量分析方法;并建立了一套UNIX平台上的高分辨像定量分析程序包,具有较高的精度和广泛的用途。
In this paper, the processing methods of two kinds of high-resolution atomic image highlights center are systematically established by studying the image processing technology of high-resolution electron microscopy: grayscale gradient detection and peak-valley extraction-grayscale average method. Based on the technique of atomic image bright spot center location, the actual process of measuring the local lattice parameters and lattice distortion in high resolution image was established by least square method. Combined with the methods such as simulation and image matching, the quantitative analysis method of extracting elemental distribution, atomic structure and other information from high-resolution image is studied in detail. A set of high-resolution quantitative analysis package on UNIX platform is established, The accuracy and wide range of uses.