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用新颖的能连续加载、卸载并配有声发射监测的涂层压入仪 ,对薄膜与基体的结合强度进行了探讨。实验结果表明 ,膜或膜 /基破坏的声发射信号各有特点 ,可区分压入过程中 (含卸载 )开裂和剥落及其对应的载荷值。压入法的临界载荷 pc 为加载过程中使膜发生初始剥落的外载 ,用涂层压入仪可精确测定。 pc 值对基体硬度和表面粗糙度的变化敏感。故用涂层压入仪可以实现用压入法考察膜 /基结合强度
The bonding strength between the film and the substrate was discussed with a novel coating press indenter that can be continuously loaded, unloaded and equipped with acoustic emission monitoring. The experimental results show that the acoustic emission signals of film or film / base destruction have their own characteristics, which can distinguish the cracking and spalling during pressing (including unloading) and their corresponding load values. The critical load of the press-in method pc is the external load that causes the film to peel off initially during the loading process, and can be accurately measured by the coating press-in instrument. pc value of the substrate hardness and surface roughness changes sensitive. Therefore, the use of coating into the instrument can be achieved using pressure method to investigate the film / base bonding strength