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论述了一种带高速光窗口的 1 6× 1 6CMOS SEED交换芯片的设计及制作 .SEED像元光窗口阵列的大小为 1 0 μm× 1 0 μm ,间距为 2 5 0 μm ,光开关速率可达 1 0 ps量级 ,对其电逻辑和光调制特性进行了测试 ,并应用到 1 6× 1 6自由空间Crossbar光学交换实验系统中 ,实现了 1 6× 1 6光信号的Crossbar网络交换 .
The design and fabrication of a 16 × 16 CMOS SEED chip with high speed optical window are discussed.The size of the SEED pixel optical window array is 10 μm × 10 μm and the pitch is 250 μm. The optical switching rate is Up to 1 0 ps order of magnitude, and its electrical logic and optical modulation characteristics were tested and applied to the Crossbar optical exchange experiment system of 16 × 16 free space to realize the Crossbar network exchange of 16 × 16 optical signals.