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真空比对标准装置是由真空泵、校准室、真空管道、各种阀门及真空规组成的。根据实际使用情况,从四个方面对真空比对标准装置进行了详细的分析,包括:校准室的研究、微调阀性能的研究、标准规计量学特性的研究、比对校准技术的研究和应用。
Vacuum calibration standard device is composed of a vacuum pump, calibration chamber, vacuum pipes, valves and vacuum gauge. According to the actual usage, the vacuum device is analyzed in detail from four aspects, including calibration chamber research, fine-tuning valve performance research, standard gauge metrology properties research, comparison calibration technology research and application .