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微型元、器件气密性检测是保证其可靠性的重要手段。本文对几年前研制成功并现已批量生产的氟油检漏仪在生产实践中检漏技术、工艺及方法进行探索与总结。作为氦质谱精密检漏的补充手段，该仪器具有灵敏可靠，可与精漏仪的下限衔接，且有工艺简便，适用于微型气密性元、器件生产厂和部分整机厂成品测试、筛选之用。并介绍了粗检漏工艺和漏气气泡与漏率的关系。
Micro-yuan, the device gas tightness testing is to ensure that the reliability of an important means. This article explores and summarizes the leak detection techniques, techniques and methods in the production practice of the fluorine oil leak detector, which was successfully developed several years ago and is now in mass production. As a supplement to the precision leak detection of helium mass spectrometry, the instrument is sensitive and reliable, can be connected with the lower limit of the leak detector, and has the advantages of simple process and is suitable for testing the finished products of the micro-airtight element, device manufacturing plants and some whole factories. Use. The relationship between rough leak detection technology and air leak bubble and leakage rate is introduced.