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用波谱仪、能谱仪和光栅调制建立的的假彩色图象相结合的方法,可以很直观的看出样品显微组织的形貌,各种化学成分的含量以及各种元素的分布情况。弥补了用谱仪只能显示X射线点而不能显示二次电子图象;只能在一条线上来显示成分曲线而不能看整体分布情况的弱点。从而使形貌、含量、分布在一张彩色图上显示出来,使半定量分析更加完善。这种方法利用位相光栅在白光信息处理系统中的衍射特性对体现与原子序数有关信息的背散射电子象进行处理制作出假彩色照片,再用波谱仪能谱仪分析确定化学成分与彩色图片的对应关系。实验过程中,首先制作光栅调制图象负片。采用黑白光栅20线/mm,天津Ⅰ型或Ⅱ型干版,采用溴乌灯光源即可翻
With the spectrometer, spectrometer and grating modulation to create a false color image combination of methods can be very intuitive to see the microstructure of the sample morphology, the various chemical composition and the distribution of various elements. Make up for the spectrometer can only display X-ray points and can not display secondary electronic images; only in a line to show the composition curve but can not see the overall distribution of weaknesses. So that the morphology, content, distribution in a color map displayed, so that semi-quantitative analysis more perfect. This method utilizes the diffraction characteristics of phase grating in the white light information processing system to process the backscattered electron image which reflects the information related to the atomic number to produce a false color photograph and then analyze the chemical composition and the color image Corresponding relationship. During the experiment, the grating modulated image negative was first produced. Using black and white grating 20 lines / mm, Tianjin Ⅰ or Ⅱ type of dry version, the light source can be turned Bromo light