基于哈特曼-夏克波前传感器的波面拼接检测方法

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提出了一种利用小口径哈特曼-夏克(H-S)波前传感器检测大口径光学系统或元件的波面拼接检测方法。其基本原理是将待测大口径波面划分为多个小口径波面,通过最小二乘法得到各个子波面斜率图相对于基准子波面斜率图的拼接参数,恢复出全孔径波面斜率图,再利用模式法复原出待测波面。建立了全局优化拼接方式的数学模型,并进行实验验证。实验采用一有效口径37.5 mm的哈特曼-夏克波前传感器对一平面反射镜面60 mm的区域进行测试,将拼接波面与利用干涉仪直接测量的全孔径波面对比,其波面残差(RMS)值为0.04λ,拼接算法精度达到λ/40。结果表明,全局优化拼接检测方案能够用于大口径光学表面的检测。 A wavefront detection method using a small aperture Hartmann-Shack (H-S) wavefront sensor to detect large aperture optical systems or components is proposed. The basic principle is to divide the large-diameter wave surface to be measured into multiple small-diameter wave surfaces, and to obtain the splicing parameters of the slope diagrams of the various wavelet surfaces relative to the slope of the reference sub-surface by least-squares method to recover the slope diagram of the full-aperture wave surface. Law to recover the wave surface to be measured. A mathematical model of global optimization of the splicing method is established and verified by experiments. The experiment uses a Hartmann-Shack wavefront sensor with an effective aperture of .537.5 mm to test the area of ​​a plane mirror 60 mm. The splicing wavefront is compared with the full aperture wave-wave measured directly by the interferometer. The wavefront residual (RMS ) Value of 0.04λ, stitching algorithm accuracy of λ / 40. The results show that the global optimal splicing detection scheme can be applied to the detection of large-aperture optical surfaces.
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