一、引言 钛酸铅PbTiO_3,是一种优良的热释电材料.特别是c轴取向的PbTiO_3薄膜,c轴就是极化轴,热释电系数r约为2.5×10~(-8)C/cm~2·K,热容量小,沿c轴的相对介电常数8_r~6小(约100),热释电品质因素较PbTiO_3,晶体有明显提高.因此有希望成为高性能指数,高灵敏度的传感器材料.目前,人们利用射频磁控溅射法已生长出口轴取向PbTiO_3薄膜. I. INTRODUCTION Lead titanate PbTiO_3 is an excellent pyroelectric material, especially the c-axis oriented PbTiO_3 thin film. The c-axis is the polarization axis and the pyroelectric coefficient r is about 2.5 × 10 -8 / cm ~ 2 · K, the heat capacity is small, the relative dielectric constant along the c-axis is about 8_r ~ 6 (about 100), pyroelectric quality factor is obviously higher than that of PbTiO_3, so it is hopeful to be a high performance index, Of the sensor material.At present, people have been using the RF magnetron sputtering method has grown export oriented PbTiO_3 film.