干涉显微镜是利用光波干涉原理,检测工件表面的微观几何形状的,我们在工作实践中摸索出一种使用方法,可以在干涉显微镜上测量几何尺寸。 这种方法不需要任何改造,也不需要外加任何专用工具,只要把干涉显微镜的可变光栏调整至趋近于零(适当大小),控光狭缝调整至极小(适当 Interfering microscope is the use of light wave interference principle, the workpiece surface microscopic geometry, we worked out in practice to find a way to use, you can measure the geometry of the interference microscope. This method does not require any modification and does not require any special tools, as long as the interference microscope microscope adjustable light close to zero (appropriate size), the control slit is adjusted to a very small