从讨论逆扩散型氦质谱检漏仪检漏压力出发,提出一种可以提高检漏压力的方法,并通过实验分析这种高压下的检漏范围、仪器本底、信号响应与清除时间,以及这种高压下检漏需要注意的问题。 Based on the discussion of the leakage pressure of inverse diffusible helium mass spectrometer, a new method to increase the leak pressure was proposed. The leak detection range, instrument background, signal response and elution time under high pressure were analyzed through experiments Leakage under high pressure need to pay attention to the problem.