通过对传统结构LED出光分析,提出采用侧面粗化来提高GaN基LED出光效率的方法,使用蒙特卡罗光子追踪方法对器件出光效率进行了模拟。结果表明:粗化侧面为三角状、底角为55°时出光效率最高,随机粗化可以获得比固定角度粗化更高的出光效率,同时降低材料的吸收系数可以提高LED的出光效率,在吸收系数为10/cm时,经过粗化后的LED出光效率可以达到46.1%。模拟结果证明侧面粗化可以较大地提高LED的出光效率。 By analyzing the LED structure of the traditional structure LED, a method of using the side roughening to improve the light-emitting efficiency of the GaN-based LED is proposed, and the light output efficiency of the device is simulated by a Monte Carlo photon tracing method. The results show that when the roughening side is triangular and the base angle is 55 °, the light extraction efficiency is the highest. Randomly roughening can obtain a higher light extraction efficiency than the fixed angle coarsening, and at the same time reducing the material absorption coefficient can improve the LED light extraction efficiency. Absorption coefficient of 10 / cm, after roughening the LED light output efficiency can reach 46.1%. Simulation results show that the side of the roughening can greatly improve the LED light output efficiency.