Residual stress of physical vapor-deposited polycrystalline multilayers

来源 :中国科学：物理学、力学、天文学英文版 | 被引量 : 0次 | 上传用户：cjn2503687

【摘要】

：

An extended one-dimensional stress model for the deposition of multilayer films is built based on the existing stress model by considering the influence of depo

【作者】

：

ZHANG Song ZHANG Hui ZHENG LiL

【机构】

：

SchoolofAerospace,DepartmentofEngineeringPhysics

【出处】

：

中国科学：物理学、力学、天文学英文版

【发表日期】

：

2015年2期

【关键词】

：

物理气相沉积残余应力分布多层膜多晶硅应力模型沉积条件工艺条件多层系统 growth models stresses physical vapo

【基金项目】

：

supported by the National Natural Science Foundation of China(Grant Nos.51076075,91224008 and 91024032)

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An extended one-dimensional stress model for the deposition of multilayer films is built based on the existing stress model by considering the influence of deposition conditions. Both thermal stress and intrinsic stress are considered to constitute the fi

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Residual stress of physical vapor-deposited polycrystalline multilayers

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