420厂研制出0.1微米机械式微进给装置。该装置经中国计量科学研究院分院严格测定,在不同位置的120次0.1微米位移中,只有三次误差为0.03微米,其余均低于0.03微米。且在最小位移量、总位移量、移动精度、重复精度等各项性能指标方面都达到或超过国外机械式微 420 factory developed a 0.1 micron mechanical micro feed device. The device by the China Institute of Metrology strict determination of the branch, in the different positions of the 120 0.1-micron displacement, only three errors of 0.03 microns, the remaining were lower than 0.03 microns. And in the minimum displacement, the total displacement, accuracy, repeatability and other performance indicators have reached or exceeded the foreign mechanical micro