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本文描述一种新的双点光源多光束平面干涉仪,能够使干涉条纹之间的距离从所对应的λ/2减少到所希望的程度,从而可以获得被检验表面的微面形信息,以便检验整个表面质量。
This paper describes a new dual-point source multi-beam planar interferometer that reduces the distance between interference fringes from the corresponding λ / 2 to the desired degree so as to obtain the micro-profile information of the surface to be examined Test the entire surface quality.