一、漏磁变压器的应用溅射离子泵两电极之间,电子被钛极接收,离子被钽极接收,因此,溅射离子泵高压电源在低真空时接近短路工作,在高真空时接近开路工作。用于溅射离子泵高压电源的漏磁变压器就是一种能够适应小电流、高电压及在短路时固定电流工作的特殊变压器。漏磁变压器不仅可以短路,使其输出呈陡降特性,还可以通过改变结构形式来改变陡降曲线的斜率,以使溅射离子泵获得较大抽速。 First, the leakage transformer application Sputtering ion pump between the two electrodes, the electrode is received by the titanium, ion tantalum is received, therefore, sputtering ion pump high voltage power supply near the vacuum in the work of short-circuit, close to open at high vacuum jobs. Leakage magnetic transformers for high voltage power supplies for sputter ion pumps are a special transformer that can accommodate small currents, high voltages and fixed currents for short circuits. Leakage magnetic transformer can not only short circuit, so that the output was steep drop characteristics, but also by changing the structure to change the slope of steep curve, so that the sputter ion pump to obtain a larger pumping speed.