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氦磁敏传感器是氦光泵磁力仪的核心部件。其中氦光源的制作工艺直接影响整机的性能。为此建立一套抽真空及精确充气的设备。其中,抽真空部分主要由机械泵、涡轮分子泵和离子泵组成。通过高精度微漏阀和薄膜压力计实现精确充气。所制氦光源可利用高压发生器及高频振荡器来激励,并测试了其光谱。利用该设备成功研制出高性能的氦光源。该设备的成功研制为其他磁力仪的相关核心部件的研制提供了经验。
Helium magnetic sensor is the core of helium pump magnetometer. The production process of helium light source directly affects the performance of the whole machine. To establish a set of vacuum and precision inflation equipment. Among them, the vacuum part is mainly composed of mechanical pumps, turbopumps and ion pumps. Accurate inflation with precision micro-leak valve and membrane pressure gauge. The resulting helium light source can be excited using a high-voltage generator and a high-frequency oscillator and its spectrum tested. The equipment has successfully developed a high-performance helium light source. The successful development of this equipment provided experience for the development of the relevant core components of other magnetometers.