论文部分内容阅读
介绍了一套线源金属原子蒸气发生装置。该装置由以下几部分组成 :不锈钢真空蒸发腔体 ;真空获得系统 ;电子枪 ;坩埚 ;能产生均匀磁场的磁极及线圈 ;推拉式内置工作平台 ;循环水冷却系统 ;电源、测量仪器及控制电路。经安装、调试和试运行试验 ,性能良好 ,已达到原设计指标。真空度达到 3× 10 - 3Pa ,对钆金属材料 ,能产生熔池的表面面积为 2 2mm× 4mm。利用此装置可开展电子枪蒸发、离子引出等多项实验研究。
A line source metal atom vapor generating device is introduced. The device is composed of the following components: a stainless steel vacuum evaporation chamber, a vacuum acquisition system, an electron gun, a crucible, a magnetic pole and a coil capable of generating a uniform magnetic field, a push-pull built-in working platform, a circulating water cooling system, a power supply, a measuring instrument and a control circuit. After installation, commissioning and commissioning test, good performance, has reached the original design specifications. The degree of vacuum reached 3 × 10 -3 Pa, for gadolinium metal, the surface area of the weld pool that can be produced is 2 2 mm × 4 mm. This device can be used to carry out electron gun evaporation, ion extraction and many other experimental studies.