本文给出了很重要的半导体工业用的N型汽相掺杂剂——砷化氢、磷化氢、锑化氢的物理和热力学性质。这些性质包括:临界常数、蒸汽压力、汽化热、热容量、密度、粘度、生成热、生成的自由能、表面张力和热导率。以一个简单的图解形式给出这些性质与温度的函数关系,因此,使用者就很容易地选取所需要的数据。 This article presents the important physical and thermodynamic properties of N-type vapor phase dopants used in the semiconductor industry - arsine, phosphine, and stibine. These properties include: critical constants, vapor pressure, heat of vaporization, heat capacity, density, viscosity, heat of formation, free energy generated, surface tension and thermal conductivity. Given a simple graphical representation of these properties as a function of temperature, users can easily select the data they need.