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为了研究氮气压强对脉冲激光沉积(PLD)类金刚石(DLC)薄膜和红外光学特性的影响,在脉冲激光沉积类金刚石薄膜的实验过程中,把沉积腔抽真空到10-5Pa,再在沉积腔中分别充入10-3、10-2和10-1Pa的氮气来沉积类金刚石薄膜。用拉曼光谱仪和X射线光电子能谱仪(XPS)对类金刚石薄膜的微结构与组成进行检测分析;用原子力显微镜(AFM)对薄膜的表面形貌进行检测分析;用傅里叶变换红外光谱仪(FTIR)对类金刚石薄膜的红外光透射谱进行检测分析。实验结果表明,沉积腔中的氮气压强从10-3Pa增加到10-1Pa时,类金刚石薄膜中sp3键含量增加;C-O和C=O含量减少;石墨晶粒尺寸减小;薄膜表面粗糙度显著增大。与此同时,氮气压强增加还导致类金刚石薄膜对红外光的增透作用减弱、增透范围变窄。
In order to study the effect of nitrogen pressure on the properties of pulsed laser deposition (DLC) films and infrared optical properties, during the experiment of pulsed laser deposition of diamond-like carbon films, the deposition chamber was evacuated to 10-5 Pa, Were filled with 10-3, 10-2 and 10-1Pa of nitrogen to deposit diamond-like carbon film. The microstructure and composition of the diamond-like carbon films were analyzed by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The surface morphology of the diamond films was detected by atomic force microscope (AFM). The Fourier transform infrared spectroscopy (FTIR) was used to detect and analyze the infrared transmission spectrum of diamond-like carbon films. The experimental results show that when the pressure of nitrogen in the deposition chamber increases from 10-3Pa to 10-1Pa, the content of sp3 bonds increases, the content of CO and C = O decreases, the size of graphite decreases and the surface roughness of the film is significant Increase. In the meantime, the increase of nitrogen pressure also led to the decrease of the antireflection effect of DLC film on the infrared light and the narrowing of the antireflection coating.