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本文报道用不同离子两步交换技术,在玻璃衬底上制作K~+离子交换掩埋波导的新工艺,它不要求施加外电场。用X射线能谱(XES)分析技术测试了K~+离子的浓度分布,证明所制出的样品是掩埋波导。
In this paper, we report the new technology of fabricating a K + ion exchange buried waveguide on a glass substrate by using two-ion exchange of different ions. It does not require the application of an external electric field. The concentration distribution of K ~ + ions was tested by X-ray spectroscopy (XES), which proved that the prepared sample was a buried waveguide.