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应用光力学效应的非制冷红外焦平面阵列(FocalPlaneArray-FPA),配有可见光读出部分的红外成像系统,可以在8至14μm光谱区得到热物体成像。其核心部件是双材料悬臂梁结构的焦平面阵列。不同于利用其他效应的非制冷红外成像系统,此种成像系统可以方便的在室温下正常工作,而且省去了相当复杂的信号转换电路,降低了制备复杂程度和成本。采用MEMS表面硅工艺制备FPA,深入研究了双材料悬臂梁结构成像系统的基本原理、光学读出系统、工艺制备难点,并得到了高温物体红外源的成像响应结果。
The uncooled Focal Plane Array (FPA) with photomechanical effect and the infrared imaging system with a visible light readout allow the imaging of hot objects in the 8 to 14 μm spectral region. The core component is a focal plane array of bimaterial cantilever structures. Unlike uncooled infrared imaging systems that utilize other effects, such an imaging system can be conveniently operated at room temperature without the need for a rather complicated signal conversion circuit, reducing manufacturing complexity and cost. Fabrication of FPA by MEMS surface silicon technology was studied in detail. The basic principle, optical readout system and process preparation of the dual-material cantilever beam imaging system were studied in detail. The imaging response of infrared source was obtained.