用射频等离子体增强化学气相沉积在钛合金表面制备类金刚石薄膜 ,利用原子力显微镜、纳米力学探针、划痕仪、滑动摩擦和微动摩擦等研究了涂层的表面形貌和力学性能。结果表明 :随涂层厚度的增加 ,表面粗糙度先增后降 ,最后趋于稳定 ,硬度和划痕临界载荷提高 ,室温空气条件下的滑动摩擦系数减小 ;对于确定的膜厚 ,随相对湿度增加 ,摩擦系数降低 ,这有利于其在体液环境中的应用 The surface morphology and mechanical properties of the coatings were studied by RF plasma enhanced chemical vapor deposition (DLCVD) on the surface of titanium alloy by AFM, nanomechanical probe, scratch tester, sliding friction and fretting. The results show that with the increase of coating thickness, the surface roughness first increases and then decreases, finally stabilizes, the critical load of hardness and scratches increases, and the sliding friction coefficient of air decreases at room temperature. For the determined film thickness, Humidity increases, the friction coefficient decreases, which is conducive to its application in the body fluid environment