【摘 要】
：
Two micromachined solenoid-type inductors with different electroplated core structures, ellipse and rectangle, were fabricated, tested and compared in order to
【机 构】
：
National Key Laboratory of Nano/Micro Fabrication Technology
【基金项目】
：
Shanghai-Applied Materials Research and Development Fund;国家高技术研究发展计划(863计划);Samsung Advanced Institute of Technology (SALT), Samsung Electronics Co., Ltd;国家自然科学基金;the Nanotechnology Program of Shangha
论文部分内容阅读
Two micromachined solenoid-type inductors with different electroplated core structures, ellipse and rectangle, were fabricated, tested and compared in order to reach optimum designs for integrated inductors and transformers. In the process of fabrication, UV-LIGA, dry etching technique, fine polishing and electroplating techniques have been adopted to achieve high performance microinductor. Experimental results show that both types of the inductors are characterized by high inductance, Q-factor and low electrical resistance. While the inductance of the inductor with rectangular magnetic core is slightly higher than that with elliptical magnetic core, the quality factor of the latter is larger than that of the former.
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