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本文绘出了灰色信噪比的定义，并将其用于多晶硅沉淀的数据分析，使表面缺陷和沉淀厚度在最佳条件下试验结果与灰色预估值更符合。
In this paper, the definition of gray signal-to-noise ratio is plotted and used for data analysis of polysilicon precipitation. The results of surface defects and sedimentation thickness are in good agreement with the gray prediction under the optimal conditions.