离子束混合技术可在低温下通过非平衡态键合作用实现薄膜与基底界面间的原子级混合,甚至可在无相互反应和互不相容的物质之间也能完成这种过程,因此通过离子束混合增强薄膜与基体粘着效应的研究受到人们的重视[1—3]。本文考察了C+离子注入对非晶态碳薄膜的摩擦学性能以及膜与 Ion beam mixing allows atom-level mixing between the film and the substrate interface through non-equilibrium bonding at low temperatures, and even between non-interacting and incompatible materials, thus allowing Ion beam mixing to enhance the adhesion of the film and the substrate by the people’s attention [1-3]. This article examines the C + ion implantation of amorphous carbon films tribological properties as well as the membrane and