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提出了一种棱镜第二光学平行差(塔差)的高精度检测方法。准直光束垂直入射到直角棱镜的斜边面,经直角棱镜反射后返回,被四象限探测器QD接收,使直角棱镜沿平行于光线方向的直线导轨移动,由直角棱镜在直线导轨近端与远端时QD测得的光斑位置差值即可计算得到棱镜塔差。方法可避免棱镜装配误差的影响,系统结构简单紧凑。通过理论分析、仿真和实验,验证了方法的可行性。在设定参数下,测量分辨率可达到0.01″,测量精度优于1″。
A high precision detection method of prism second optical parallel difference (tower difference) is proposed. The collimated beam is perpendicularly incident on the hypotenuse of the right angle prism and is reflected by the right angle prism and then returned to be received by the four quadrant detector QD. The right angle prism is moved along the linear guide parallel to the light direction. Distal QD measured spot position difference can be calculated prism tower difference. The method can avoid the influence of prism assembly error, and the system structure is simple and compact. Through theoretical analysis, simulation and experiment, the feasibility of the method is verified. Under the set parameters, the measurement resolution can reach 0.01 “, the measurement accuracy is better than 1”.