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采用直流二极溅射方法制备SmCo_5和Sm_(0.5)MM_(0.5)Co_5非晶薄膜。用X光和电子衍射方法对非晶薄膜晶化过程进行了研究。在550℃时有明显的β-Co相析出,一直到750℃仍只有两条β-Co线条和原有的漫散宽带,形不成金属间化合物相。与文献中厚膜不同,这可能与薄膜具有较大的表面能,影响了晶化过程有关。磁秤、振动样品磁强计、霍尔电势和磁转矩测量表明,这些非晶薄膜是软磁性的,具有平行膜面的磁各向异性。晶化热处理后,磁化强度有很大提高,但仍然没有强的永磁性,这与薄膜形不成金属间化合物相的结构分析结果相一致。
SmCo_5 and Sm_ (0.5) MM_ (0.5) Co_5 amorphous films were prepared by DC sputtering. The crystallization process of amorphous thin films was studied by X-ray and electron diffraction methods. At 550 ℃, there is obvious precipitation of β-Co phase, and up to 750 ℃, there are still only two β-Co lines and the original diffuse broadband, forming no intermetallic compound phase. Unlike the thick films in the literature, this may be related to the larger surface energy of the film, affecting the crystallization process. Magnetic scales, vibrating sample magnetometers, Hall potential and magnetic torque measurements show that these amorphous films are soft magnetic with magnetic anisotropy parallel to the film surface. After the crystallization heat treatment, the magnetization has greatly improved, but there is still no strong permanent magnetism, which is consistent with the structural analysis of the film-shaped intermetallic compound phase.