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介绍了一种新型涂层压入仪。对比了压入法、划痕法、接触疲劳法测定不同处理基体、同类ＰＥＣＶＤ ＴｉＮ 膜基结合强度的变化规律。结果表明采用该压入仪， 运用连续加载压入法， 可方便地定性或半定量测定ＰＥＣＶＤ ＴｉＮ 膜基结合优劣。该法所测临界载荷Ｐｃ 不仅反映膜基结合的优劣， 还反映了膜基体系的承载能力。
A new type of coating press is introduced. Comparing the law of pressing, scratching and contact fatigue to determine the bonding strength of different treated substrates and similar PECVD TiN films. The results show that the PincVD TiN film-based bonding can be easily qualitatively or semi-quantitatively determined by using the press-in instrument and the continuous loading press-in method. The method of measuring the critical load Pc not only reflects the merits of film-based bonding, but also reflects the film-based system carrying capacity.