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硅压力传感器发展的一个重要趋势,是向高灵敏度的微压传感器发展。1993年我们率先采用微机械的梁膜结构制得PT-24量程lkpa微压传感器。但在进一步提高灵敏度的研究过程中,遇到如下几个问题:(1)非线性随着灵敏度提高变差;(2)灵敏度提高,稳定性变差;(3)过载能力不够;(4)静电封接时背岛与玻璃基片相接。本文针对上述问题进行了研究,在PT-24量程1kpa微压传感器的版图和工艺基础上进行改进和提高,成功地设计并制作出PT-28量程500pa压阻式扩散硅微压传感器。
An important trend in the development of silicon pressure sensors is the development of high-sensitivity micro-pressure sensors. In 1993, we took the lead in the use of micro-mechanical beam structure PT-24 manufacturing range lkpa micro-pressure sensor. However, in the process of further improving the sensitivity, several problems are encountered as follows: (1) the nonlinearity becomes worse as the sensitivity increases; (2) the sensitivity increases and the stability deteriorates; (3) the overload capacity is not enough; (4) Back to the island when the electrostatic seal and the glass substrate phase. In this paper, the above problems were studied. Based on the layout and technology of 1kpa PT-24 range micro-pressure sensor, the pressure sensor was designed and fabricated successfully.