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在普通850nm垂直腔面发射激光器基础上制备出带有金属纳米颗粒结构的微小孔径垂直腔面发射激光器。当小孔和金属颗粒的直径分别为400nm和100nm时,其最大输出光功率达到0.5mW。介绍了该器件的制备工艺,从实验和理论两方面验证了金属纳米颗粒结构激发局域表面等离子体,从而使输出光功率得到提高。
Aperture vertical cavity surface-emitting lasers with a metal nanoparticle structure were fabricated on the basis of a conventional 850 nm vertical-cavity surface-emitting laser. When the holes and metal particles are 400nm and 100nm in diameter, the maximum output optical power of 0.5mW. The fabrication process of this device is introduced. It is verified experimentally and theoretically that the metal nanoparticle structure stimulates the local surface plasmon, and the output optical power is improved.