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与光刻或电子束刻蚀相比,双光子光聚合作用建立在其三维能力的基础上,特征尺寸接近衍射极限,在光子器件和微机械方面有用。本文指出,利用非线性效应可超越衍射极限,实现120 nm的次衍射极限分辨率。这使得制作功能型微机械成为可能,并将光子和光电子器件的工作波长移到可?
Compared with lithography or electron beam lithography, two-photon photopolymerization is based on its three-dimensional capabilities, with feature sizes close to the diffraction limit, useful in photonic devices and micromechanics. This paper points out that the use of nonlinear effects can exceed the diffraction limit, to achieve 120 nm diffraction limit resolution. This makes it possible to create functional micromechanics and to move the working wavelengths of photons and optoelectronic devices to?