真空镀敷固体润滑膜是六十年代发展起来的一种新型润滑膜,其成膜方法是在真空中借助于电场作用下的高能等离子体或热能将固体润滑剂直接镀敷于工件表面上。它不需用粘结剂,具有镀层粘附牢固、薄而均匀、摩擦磨损性能良好、镀敷重复性好等优点,避免了粘结膜在真空、高温、辐射等环境中因粘结剂挥发或分解出气体而干扰精密仪表、光学元件的正常工作,或因粘结剂变质而使润滑膜失效的不良现象和克服了电化膜的镀层厚、磨屑多、重复 Vacuum coating of solid lubricant film is a new type of lubricant film developed in the 1960s. The film forming method is that the solid lubricant is directly plated on the surface of a workpiece by using high-energy plasma or thermal energy under vacuum in vacuum. It does not require adhesive, with a coating adhesion firm, thin and uniform, good friction and wear resistance, plating repeatability and good, to avoid the adhesive film in the vacuum, high temperature, radiation and other environment due to binder evaporation Or break down the gas and interfere with precision instruments, optical components of the normal work, or due to adhesive deterioration of the lubricating film failure of the phenomenon and to overcome the coating thickness of the electrochemical film, wear debris, repeated