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采用直流磁控溅射方法制备了Fe Pt多层膜和FePt单层薄膜 ,再经不同温度真空热处理得到了有序相L10 FePt薄膜 .通过x射线衍射谱和磁性研究表明 ,FePt单层薄膜需要在 5 0 0℃以上热处理 ,才能开始有序化转变 ,而Fe Pt多层膜可以降低FePt薄膜有序化温度 .[Fe(1 5nm) Pt(1 5nm) ]1 3薄膜在 35 0℃热处理后 ,有序度已经增加到 0 6 ,相应矫顽力达到了 5 0 1kA m .多层膜化促进有序化在较低的温度下进行 ,这是由于热处理过程中多层膜界面的消失提供了有序化过程额外的驱动力 .
The Fe Pt multilayer films and FePt single layer films were prepared by direct current magnetron sputtering and the ordered phase L10 FePt films were obtained by vacuum heat treatment at different temperatures.The results of X-ray diffraction and magnetic studies show that FePt single-layer films require At temperatures above 500 ℃, the orderly transformation can begin, whereas Fe Pt multilayer films can reduce the ordering temperature of FePt thin films [Fe (1 5nm) Pt (1 5nm)] 1 3 at 35 ℃ After that, the degree of ordering has been increased to 0 6 and the corresponding coercivity reaches 5 0 1 kA m. Multilayerization facilitated the ordering at lower temperatures due to the disappearance of the multilayer interface during the heat treatment Provides an additional driver of the ordering process.