自 IC 诞生以来,IC 芯片的发展基本上遵循了 Intel 公司创始人之一的 Gordon E.Moore 1965年预言的摩尔定律。该定律称:芯片上可容纳的晶体管数目每18个月增加一倍,即芯片集成度18个月翻一番,这视为引导半导体技术前进的经验法则。1978年时,人们认为光学光刻的极限是1μm。而发展到20世纪末,人们认为光学光 Since the birth of IC, the development of IC chip basically follows the Moore’s Law of 1965 predicted by Gordon E. Moore, one of the founders of Intel Corporation. The law states that the number of transistors that can be accommodated on a chip doubles every 18 months, doubling the chip integration level by 18 months, as a rule of thumb that guides the advance of semiconductor technology. In 1978, the limit of optical lithography was thought to be 1 μm. And to the end of the twentieth century, people think of optical light