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实验观察了三元合金Al-Li-Mg和二元合金Cu-Be中低Z元素(如Li和Be)的表面偏析行为。采用了二次离子质谱仪(SIMS)和俄歇电子谱仪(AES)进行表面分析。Al-Li-Mg合金的实验结果表明:样品温度在150℃到300℃的范围内,表面Li原子的浓度接近100％,这一结果可由Gibbsian偏析理论进行解释,其中Li在样品表面的深度分布有一定程度的展宽,这是由于刻蚀过程中高能氩(Ar)离子反冲植入所致。当样品温度超过360℃时,发现合金中的杂质元素Be开始在表面上偏析。为此,作者采用SIMS和AES对Cu-Be 合金进行了表面偏析研究。在位的AES分析表明:样品升温过程中,Be和O在合金表面富集,考虑到Be和O的化学亲和作用,偏析的根本动力来源于真空中的残余氧气。同时还对Be在合金表面的深度分布进行了测量。
The surface segregation behaviors of low-Z elements (such as Li and Be) in Al-Li-Mg ternary alloy and Cu-Be binary alloy were observed experimentally. Surface analysis was performed using secondary ion mass spectrometry (SIMS) and Auger electron spectroscopy (AES). The experimental results of Al-Li-Mg alloy show that the sample temperature is in the range of 150 ℃ to 300 ℃ and the concentration of Li atoms on the surface is close to 100%. This result can be explained by Gibbsian theory of segregation. The depth distribution of Li on the sample surface There is a certain degree of broadening, which is due to the high energy argon (Ar) ion recoil implanted during the etching process. When the sample temperature exceeds 360 ° C, it is found that the impurity element Be in the alloy begins to segregate on the surface. To this end, the authors studied the surface segregation of Cu-Be alloys using SIMS and AES. In situ AES analysis showed that Be and O were enriched on the surface of the alloy during the heating process. Considering the chemical affinity between Be and O, the fundamental kinetic energy of segregation originated from the residual oxygen in the vacuum. The depth profile of Be on the alloy surface was also measured.