近来,作为钢和硬质合金等的表面硬化技术,采用PVD和CVD法的气相沉积法引起了人们的注目,本文叙述属于PVD工艺中的一种多弧离子镀的原理、操作、特点及应用。一、引言在材料表面改性技术方面,近年来有惊人的进展。其中在金属表面涂覆陶瓷的硬质薄膜技术,以增加工具、模具、机械零件等的表面硬度,提高耐磨性,改善切削性能和脱模性,现已进入实用阶段。在表面镀膜成形的技术中,其分类如图 Recently, as a surface hardening technique of steel and cemented carbide, the vapor deposition method using PVD and CVD methods has drawn people’s attention. This article describes the principle, operation, characteristics and application of a multi-arc ion plating method belonging to a PVD process . I. INTRODUCTION In the field of material surface modification technology, there has been astonishing progress in recent years. One of the metal surface coating of ceramic hard film technology to increase the surface hardness of tools, molds, mechanical parts, etc., to improve the wear resistance, improve the cutting performance and mold release, has now entered a practical stage. In the surface coating forming technology, its classification as shown