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在高精度的光学元件面形检测中,为了保证检测的精度,必须对高精度菲索干涉仪的标准镜的自重和温度变形进行严格地控制。针对高精度菲索干涉仪标准镜的精度要求,设计了一种新的标准镜装卡结构。采用有限元方法分析了标准镜在胶接方式下的表面变形情况,参考面表面变形峰谷(PV)值仅为9.6nm,均方根(RMS)值为2.1nm。同时对不同环境温度下参考面的变形进行了计算得出面形的峰谷值和均方根值。最后介绍球面标准具的装配过程。
In the high-precision surface inspection of optical components, in order to ensure the accuracy of detection, it is necessary to strictly control the self-weight and temperature deformation of the standard mirror of the high-precision FESO interferometer. Aimed at the precision requirement of high precision Fischer interferometer standard mirror, a new standard mirror mounted card structure is designed. The surface deformation of the standard mirror under the mode of bonding was analyzed by finite element method. The peak value of surface deformation (RMS) was only 9.6 nm and the root mean square (RMS) value was 2.1 nm. At the same time, the deformation of the reference surface under different ambient temperatures was calculated to obtain the peak-valley value and rms value of the surface shape. Finally introduce the spherical etalon assembly process.