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一、引言新墨西哥州阿布珂奎空军武器实验室发展了一种计算机控制的数字式外差干涉仪(以下简称 DHI)。它具有自适应光学控制和闭环分析的能力。该装置是专为检测大型光学零件而设计的。其测量精度比一般常用的干涉仪所能
I. INTRODUCTION The Abu Kekui Air Force Arms Laboratory in New Mexico has developed a computer-controlled digital heterodyne interferometer (hereinafter referred to as DHI). It has the ability to adapt to optical control and closed-loop analysis. The unit is designed for inspection of large optical components. Its measurement accuracy than the commonly used interferometer can