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将增透亚波长光栅分别置于微机电系统(MEMS)波长可调谐垂直腔面发射激光器(VCSEL)的内腔、上分立布拉格反射器(DBR)的上表面和下表面,分析了其对器件波长调谐范围、驻波场和谐振腔波长的影响。通过建模计算可知,当亚波长光栅置于MEMS波长可调谐VCSEL的内腔中时,波长调谐量最大,可达54nm;光栅置于上DBR的上表面和下表面时,波长调谐量仅能达到40nm和33nm。通过分析驻波场可以发现,当亚波长光栅置于上DBR的上表面时,有源区能量占总能量的0.36%,而置于上DBR的下表面和内腔时分别为0.08%和0.02%。比较三种结构的谐振腔波长可以发现,对于光栅在内腔和上DBR的下表面时,横电(TE)和横磁(TM)偏振对应的谐振腔波长分别出现了8.3nm和10.1nm的分离,而光栅放置在上DBR的上表面时两个偏振波长并没有偏离,由此可知,光栅在内腔和上DBR的下表面实现偏振稳定原理与光栅在上DBR的上表面时是不同的。
The transreflective subwavelength gratings were placed in the cavity of a MEMS tunable vertical cavity surface emitting laser (VCSEL), respectively on the upper surface and the lower surface of a discrete Bragg reflector (DBR) Wavelength tuning range, standing wave field and resonant cavity wavelength. The modeling calculation shows that when the sub-wavelength grating is placed in the inner cavity of the MEMS wavelength tunable VCSEL, the wavelength tuning amount is the largest, up to 54 nm. When the grating is placed on the upper surface and the lower surface of the upper DBR, the wavelength tuning amount can only be Reaching 40 nm and 33 nm. By analyzing the standing wave field, it can be seen that when the subwavelength grating is placed on the upper surface of the upper DBR, the energy of the active region accounts for 0.36% of the total energy and is 0.08% and 0.02%, respectively, when placed on the lower surface and lumen of the upper DBR %. Comparing the wavelength of the three types of resonators, we found that for the grating on the lower surface of the cavity and the upper DBR, the wavelengths corresponding to transverse (TE) and transverse magnetic (TM) polarizations appear at 8.3 nm and 10.1 nm, respectively When the grating is placed on the upper surface of the upper DBR, the two polarized wavelengths do not deviate from each other. From this, it can be seen that the principle that the grating achieves polarization stabilization on the lower surface of the inner cavity and the upper DBR is different from that of the grating on the upper surface of the upper DBR .