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本文研究报导了ZQ高压功率二极管的玻璃钝化方法,采用适当的腐蚀技术、玻璃粉涂敷技术和玻璃微晶化技术,获得了良好的内层玻璃钝化膜。实验结果表明,用该膜钝化的ZQ器件具有优良的可靠性和高温工作特性。
This paper reports the glass passivation of ZQ high-voltage power diode. The proper etching technology, glass powder coating technology and glass microcrystallization technology are used to obtain a good inner glass passivation film. Experimental results show that ZQ devices passivated with this film have excellent reliability and high temperature operating characteristics.