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基于相位凝固技术的激光反馈干涉术,为验证其可行性及测量分辨率,设计了微位移测量验证系统。在系统中利用相位调制器进行外腔相位调制,采用相位凝固技术进行采样及解调,重构出外部目标物的位移信息。建立了测量系统的模型,进行了基于相位凝固技术的调制解调算法仿真及位移测量验证实验。实验验证了仿真的正确性和系统的可行性,通过比较外部目标物的实际位移与系统重构位移结果,得出测量峰谷值相对误差小于3%。研究表明,此测量方法能够准确地测量出外部目标物的位移信息,可有效提高系统测量分辨率,并可实现微位移的实时测量。
In order to verify its feasibility and measurement resolution, laser displacement interferometry based on phase solidification technique is designed. In the system, the phase modulator is used to modulate the external cavity phase, the phase solidification technique is used to sample and demodulate, and the displacement information of the external target is reconstructed. The model of the measurement system is established and the simulation of the modem algorithm based on the phase solidification technique and the displacement measurement verification experiment are carried out. The correctness of the simulation and the feasibility of the system are validated by experiments. By comparing the actual displacement of the external target with the displacement of the system, the relative error of the measured peak-to-valley is less than 3%. The research shows that this method can accurately measure the displacement information of the external target, which can effectively improve the system measurement resolution and real-time measure the micro-displacement.