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讨论了SmartSensor与MEMS的全新概念。结合微机械加工技术的发展，概述了现代传感器技术智能化、功能集成化的新趋势，及其对现代微电子、微型电子机械乃至整个信息技术领域的深远影响。
Discussed the new concept of SmartSensor and MEMS. Combined with the development of micromachining technology, the new trend of intelligent and functional integration of modern sensor technology is summarized, and its profound influence on modern microelectronics, microelectronic machinery and even the entire information technology field is summarized.