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本文叙述了真空磁控反应溅射沉积TiN涂层的基本原理和试验方法;对碳素工具钢刀具和硬质合金刀具进行了工艺试验;测定了涂层性能、进行了切削性能测定,使刀具寿命普遍有提高,最高达六倍的良好结果。
In this paper, the basic principles and test methods of TiN coating deposited by vacuum magnetron reactive sputtering were described. The technological tests of carbon tool steel cutter and carbide cutting tool were carried out. The coating performance was measured and the cutting performance was measured. Life expectancy generally increased, up to six times the good result.