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利用小功率40kHz的CO2脉冲激光对25μm厚的超薄熔石英玻璃与熔石英毛细管端面进行热熔焊接,研究和分析了占空比(脉冲激光功率)、离焦激光预热、离焦激光退火对熔石英玻璃热熔焊接的影响。结果表明,实现超薄熔石英玻璃与毛细管端面无气化穿孔、密封、牢固焊接的占空比为37%;占空比为20%的+2mm离焦脉冲激光预热对超薄熔石英玻璃无裂纹/裂缝的焊接起到了关键作用;适当占空比的-2mm离焦脉冲激光退火能够释放超薄熔石英玻璃在热熔焊接过程中产生的残余热应力,提高熔石英器件的性能,经激光焊接的光纤法布里-珀罗传感器的压力和温度曲线的线性度分别为0.9995和0.9991,而且重复性好。
The low-power 40kHz CO 2 pulsed laser was used to heat-weld the 25μm-thick ultrathin fused silica and fused-silica capillary. The effects of duty cycle (pulsed laser power), defocus laser preheat and defocus laser annealing Influence of hot melt welding on fused quartz glass. The results showed that the duty cycle of 37% was achieved with the non-gasified perforations of the ultrathin fused silica glass and the capillary end face, and the sealed and firm welding. The + 2mm defocus pulsed laser with 20% duty cycle was used to preheat the ultrathin fused silica glass Crack-free / crack-free soldering plays a key role; -2mm defocus pulsed laser annealing at an appropriate duty cycle can release the residual thermal stresses in ultra-thin fused silica glass during hot-melt welding and improve the performance of fused- The linearity of the laser welded fiber Fabry-Perot sensor’s pressure and temperature curves are 0.9995 and 0.9991, respectively, with good repeatability.