Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise

来源 :Chinese Optics Letters | 被引量 : 0次 | 上传用户:szhg5583
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We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm. To obtain a planar waveguide, oxygen ions with an energy of 3.0 MeV and a fluence of 1.5×1015ions/cm2 are implanted in the polished face of LiNbO3 crystals. For planar waveguides, a loss of 0.5 dB/cm is obtained after annealing at 300°C for 30 min. The ridge waveguide is fabricated by the diamond blade dicing method on optimized planar waveguides. The guiding properties are investigated by prism coupling and end-face coupling methods.
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